2010; Physical and Mathematical Sciences, 45(1 (224): 63–67
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METHOD FOR MEASURING THICKNESS OF THIN OBJECTS WITH A NANOMETER RESOLUTION, BASED ON THE SINGLE-LAYER FLAT-COIL-OSCILLATOR METHOD

Received: 2025-02-23 · Published: 2010-10-21

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Original title
METHOD FOR MEASURING THICKNESS OF THIN OBJECTS WITH A NANOMETER RESOLUTION, BASED ON THE SINGLE-LAYER FLAT-COIL-OSCILLATOR METHOD
Author
S.G. Gevorgyan
Published
2010-10-21
Licence
Creative Commons Attribution 4.0 International

Abstract

A method for measuring of any composition films and tapes thickness with a nanometer resolution is suggested and validated experimentally. That operates on the base of a single-layer flat-coil-oscillator technique. A laboratory prototype of a device is designed and created, based on this method. Besides, PC operation in a “NI LabVIEW” software environment, as well as preliminary tests and calibration of the created device is implemented. It may find variety of applications in a research and in high-tech technology.
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