Multilayer Anisotropic Thin Film with a Twist
ISSN: 1829-1171
Submitted: 2026-07-17
Natural Sciences, Physics, 2026
Single-Layer Amorphous Carbon Anti-Reflective Coatings Obtained by The Pulsed Laser Deposition Method
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Submitted: 2026-07-24
© 2026 by author(s) and The Gufo Inc.
This work is licensed under Creative Commons Attribution–NonCommercial International License
(CC BY-NC 4.0).
Abstract
Single-layer a-C anti-reflective coatings on the Si and GaAs substrates were obtained by using of a Q-switched nanosecond pulsed laser deposition method. It is established that singlelayer a-C coatings effectively reduce the high reflection of substrates (on average to 5 % for Si and 8 % for GaAs in 400-750 nm wave range). Used by us technology for fabrication of a-C antireflective coatings is very simple (excludes high-energy implantation, high-temperature diffusion and deposition processes) and applied for the first time.